Handbook of Optical Metrology

Carefully designed to make information accessible without sacrificing coverage of advanced topics, this book discusses fundamental principles and techniques before exploring practical applications of optical methods. It includes contributions from veterans of the field and up-and-coming researchers. The handbook comprises 30 chapters divided into three sections: Fundamental of Optical Elements and Devices, Fundamentals of Principles and Techniques for Metrology, and Practical Applications. The editor draws on his experience in teaching and industry to provide a resource that is as authoritative as it is practical.